Theoretical dependence of the target threshold sputtering energy on the incidence angle of primary ions

To calculate the angular dependence of threshold sputtering energy on ratio target masses and incident ions, surface blocking phenomenon is used. It established that varies inversely proportional to cosine incidence angle primary beam (the measured from normal surface) power s/2 (s a exponent in interaction potential colliding particles). A comparison with literature data carried out. Keywords: sputtering, energy, shading cone, ions incidence.